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Active vibration isolation unit Product List

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6-degree-of-freedom active vibration isolation system

6-degree-of-freedom active vibration isolation system

If you choose based on vibration isolation performance and stability, the air pressure controlled active vibration isolation system.

The MAPS series active vibration isolation system from Meiritsu Seiki is a unit type that incorporates pneumatic actuators for vertical and horizontal use within a compact design. By using four units, it demonstrates excellent vibration isolation, damping, and positioning performance against all degrees of freedom of vibration. −− Features −− ● Supports all degrees of freedom of vibration even in a compact size ● Capable of isolating vibrations from equipment over 10 tons with standard MAPS ● Does not shake even when mounted with operating devices such as stages ● Cuts vibrations in frequency ranges that are difficult to manage with passive isolation ● MAPS excels in positioning accuracy and leveling precision

  • Anti-vibration, earthquake-proof, vibration-isolating devices

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Active Vibration Isolation System "ME Series"

Active Vibration Isolation System "ME Series"

Control in 3D (6 degrees of freedom)! It has vibration isolation performance that is not affected by the mounted object.

The "ME Series" is a vibration control system that continuously monitors the vibrations of the mounted board and controls them by applying counter-phase forces using built-in actuators. The gain adjustment, which is essential for active control, is automatically optimized by Meiritsu Seiki's original control system. By re-evaluating the device structure, we have made it possible to use lightweight mounted objects, such as small SPMs, without compromising vibration isolation performance. 【Features】 ■ 6 degrees of freedom active control ■ Control in three dimensions (6 degrees of freedom) ■ Automatic active adjustment & automatic leveling ■ Vibration isolation performance unaffected by the mounted object ■ Honeycomb optical table compatible (optional) *For more details, please refer to the PDF materials or feel free to contact us.

  • Other physicochemical equipment

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Linear Active Vibration Isolation Unit "VAAV-S" EMC Countermeasure Type

Linear Active Vibration Isolation Unit "VAAV-S" EMC Countermeasure Type

It is effective in microscopes that dislike low-frequency vibrations that cannot be eliminated by passive vibration isolation tables. It can be used with just a small compressor and power supply.

The Linear Active Vibration Isolation Unit "VAAV-S" uses a unique active vibration isolation algorithm for high-speed calculations, and with a non-air-based ultra-fast response linear actuator and ultra-sensitive velocity sensors, it instantly cancels out vibrations. Since it only uses air springs for load support, it can provide world-class vibration isolation performance through floor feed-forward control using ultra-sensitive velocity sensors that can be deployed on the floor side with just a small compressor and power supply. 【Features】 ○ Excellent responsiveness ○ Low air source requirement ○ High cost performance For more details, please contact us or download the catalog.

  • Anti-vibration, earthquake-proof, vibration-isolating devices

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Active Vibration Isolation Unit "VAAV-H"

Active Vibration Isolation Unit "VAAV-H"

Achieving slim design with the same performance as conventional products! Pneumatic active vibration isolation unit.

The active vibration isolation unit "VAAV-H" is equipped with a dedicated ultra-sensitive acceleration sensor for VAAV. It accurately detects extremely small vibrations. Using a unique active vibration isolation algorithm for high-speed computation, it instantly cancels out vibrations with a high-precision, high-output actuator. Additionally, ultra-sensitive acceleration sensors are generously deployed on the floor side, achieving world-class vibration isolation performance through feedforward control. 【Features】 ○ Maintains the same performance as the VAAV-A series while keeping the overall height of the device low. ○ High-precision control of displacement and position in all directions is possible through pneumatic control. ○ Selection of high-flow valves with fast response capable of handling large moving loads is available. ○ Safe and secure design compliant with CE marking (Controller SAC-07). ○ Standard features include stage feedforward functionality and vibration waveform display analysis software. For more details, please contact us or download the catalog.

  • Anti-vibration, earthquake-proof, vibration-isolating devices

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Technical Document: "What is Vibration Isolation... Overview of Passive Vibration Isolation Tables"

Technical Document: "What is Vibration Isolation... Overview of Passive Vibration Isolation Tables"

This document introduces the types of vibration isolation tables and their main components, as well as examples of vibration isolation table configurations and characteristics.

= Content = 1. Vibration isolation effect of the vibration isolation table 2. Shock response of the vibration isolation table 3. Types and performance of vibration isolation materials 3-1 Comparison of characteristics by type of vibration isolation material 3-2 Air spring (bellows type) 3-3 Air spring (diaphragm type) 3-4 Coil spring type 3-5 Vibration isolation rubber type 4. Automatic level adjuster 5. Measurement of vibration isolation effect For more details, please contact us or download the catalog.

  • Anti-vibration, earthquake-proof, vibration-isolating devices

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[Example] Active Vibration Isolation Measures for LCD Substrate Inspection Equipment

[Example] Active Vibration Isolation Measures for LCD Substrate Inspection Equipment

Measures taken with the air servo active vibration isolation system! A good vibration environment has been established across all frequency ranges.

We would like to introduce a case study on active vibration isolation measures for liquid crystal substrate inspection equipment. During the installation of a large liquid crystal substrate inspection device (length measuring machine), a preliminary survey of the vibration environment of the installation floor revealed that it exceeded the allowable limits. This length measuring machine observes the line width of patterns optically and is sensitive to vibration environments, so we implemented measures using an air servo active vibration isolation device. After the active vibration isolation measures were taken, we cleared the vibration allowable limits for the device and were able to establish a good vibration environment across all frequency ranges. [Case Overview] ■ Issue: A preliminary survey of the vibration environment of the installation floor for the large liquid crystal substrate inspection device (length measuring machine) revealed that it exceeded the allowable limits. ■ Measures: Installation of an air servo active vibration isolation device. ■ Effect: Cleared the vibration allowable limits for the device and established a good vibration environment across all frequency ranges. *For more details, please refer to the PDF document or feel free to contact us.

  • Vibration Monitoring
  • Anti-vibration, earthquake-proof, vibration-isolating devices

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